For pumping and venting of uhv systems when an extremely low outgassing rate is important. Minute particles such as a piece of iint can seriously affect the ability of the valve to produce a vacuumtight seal. Manual actuator hand wheel, pneumatic actuator single achting with closing. Gate valves gate valves allow a 100 % open position and thus a maximum conductance. This manual is valid for the valve ordering numbers listed on page 31 of this manual.
General purpose valve for isolation in uhv or other demanding applications. Agilent valves by vataluminum gate valves series 12 vacuum gate valve with pneumatic actuator this manual describes the aluminium gate valve with isof, iso63, iso100 and 250 flanges. Aluminum gate valves series 54 thank you for choosing agilent valves by vat. Vats series 010 manual mini uhv gate valve is a general purpose vacuum gate valve for isolation in ultrahigh vacuum uhv or other demanding. Semiconductor manufacturing, synchrotrons, thin film technology, high energy, physics. With the combination of these two wellknown names in the vacuum industry, we are confident that agilent valves by vat will meet your most demanding vacuum control needs. They can be manually operated with a standard hex wrench, so no torque wrench is required. The vat firmware may not be used for purposes other than those intended nor. Vat 10846xe28 dn 200 10 od conflat uhv vacuum gate valve. Leaf springs hold gate and counter plate against the carriage with the ball retainers. This means, the valve is mechanically locked in the closed position.
The valves are manually operated with a standard hex wrench, so no torque wrench is required. Available with manual actuator or with extended or compact double acting pneumatic. This kit fits the following hva elastomer viton sealed manual bonnet gate valves part numbers. Metalsealed cf flanges provide compatibility with uhv systems when pressure ranges approximate 1 x 1010 mbar and higher bakeout temperatures of 200c are needed. The valve features the monovat sealing technology and a pneumatic actuator. Allmetal gate valve series 481 allmetal gate valve series 482. Contact us ideal vacuum products, llc 5910 midway park blvd ne, albuquerque, nm 871095805 phone. We have 1 vat 10840e44 manual available for free pdf download. Allmetal uhv valves series 54 agilent is pleased to offer the allmetal uhv series 54 valves in partnership with vat, which are suitable for extreme, ultrahigh vacuum uhvxhv. Manual uhv gate valve ancorp high and ultrahigh vacuum.
With the additional air pressure tank the valve will stay in the closed position for a defined time even when compressed air and electrical power is missing. Ideal vacuum vat mini uhv gate valve series 01 pneumatic. Chemical engineering department, carnegie mellon university. Used as isolation valves in uhv and extreme uhv systems. Mini uhv gate vacuum valve with special valve gate, suitable to. The approved vatlock sealing principle ensures a virtually shockfree locking. Manual actuator hand wheel, pneumatic actuator double acting, pneumatic actuator single acting with closing spring nc. Uhv gate valve with pneumatic actuator 25 pages control unit vat 48. These standard uhv gate valves are for many applications. Vat series 1 gate valves the molecular materials research center. These valves provide valving for cryopumps, turbo pumps, ion pumps and other applications requiring clean, low outgassing valves.
It is often used in pipings of semiconductor process systems. Manual uhv gate valve vats series 108 uhv gate valve is the standard valve for ultrahigh vacuum uhv isolation applications in research and industry. Actuator types, 3 position pneumatic actuator, manual actuator hand wheel, pneumatic. Manual mini uhv gate valve ancorp high and ultrahigh.
Gate valve for gas analysis with bypass valves pressure reduction of the process gas by means of two bypass valves with orifice analysis of the residual gases at base pressure with the gate valve open very compact vacuum tight gate valve with manual or pneumatic actuator 2, 3. Norcal products copper sealed pneumatic gate valves have a vacuum range of 1x1010 torr. The standard valve for uhv isolation applications in research and industry. Norcal products gate valves have a slim profile, shorting the gas path. Please call our toll free number at 8663320500 or send an email to our sales team. Gate valve with single acting pneumatic cylinder and closing spring.
The fabrication number is indicated on each product as per the. Gate valve mechanism developed by vat gate is mechanically locked in valve closed position remark. Vat series 01 mini uhv gate valve pneumatic acuator this vat mini uhv series 01 gate valve with pneumatic acuator and is brand new in excellent condition. We are the worldwide leading supplier of vacuum valves and vacuum components. Move gate to the intermediate position by compressed air and keep up an air pressure of approx. Leaf springs hold the gate and counter plate against the carriage. Manual mini uhv gate valve vats series 010 manual mini uhv gate valve is a general purpose vacuum gate valve for isolation in ultrahigh vacuum uhv or other demanding applications. This manual is valid for the valve ordering numbers. Page 4 valve series according to vacuum levels 5 valve series according to nominal diameters 6 company profile 8 ordering, ordering number, serial number 9 quality certification, cad drawings a page series gate valves, pendulum valves 10 010 mini uhv gate valve universal application 16 012 mini vacuum gate valve low cost gate valve in small diameters 20 08 insertable gate valve thin valve. Mini uhv gate vacuum valve with special valve gate. Mini uhv gate valve series 01 series 010 banner industries. Vat firmware are intended for use with vat products. Uhv gate valves, electropneumatic, with position indicator pi, with pilot valve pv, with valve seal vulcanized further information less information metalsealed stainless steel housing vulcanized, cavityfree valve disk seal up to dn 200 cf.
Actuator types, 3position pneumatic actuator, manual actuator hand. Agilent valves by vataluminum gate valves series 54 voiding the warranty the valves described in this manual are designed to be used in a clean system. For more information regarding products, visit video demo\product inspection view. Vat catalogue 2012 vat vakuumventile ag pdf catalogs. Special gate for the installation of various foils. Uhv gate valve with pneumatic actuator dn 63 200 2 12 8. The vat firmware contains a limited, time unlimited user license. Vat vacuum valves angle, butterfly, gate and rectangular. Stainless steel valves, allmetal uhv valves series 54 agilent. Agilent valves by vat instruction manual uhv allmetal valves.
Vat 10846xe28 series 108 dn 200 10 od cf uhv vacuum gate valve. They are bellows sealed and their mechanism is free of lubricants. Description, the standard valve for uhv isolation applications in research and industry. In the open position, the mechanism gate and counter plate is completely inserted in the body. Mini uhv gate valve universal applications modular actuator body material stainless steel manual actuator with handwheel, with position indicator.
1358 1051 334 486 517 1121 1164 443 675 1329 797 31 728 1415 306 812 850 716 371 1096